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Adopts ISO 14644-3:2005 with national modifications to provide test methods for unidirectional and non-unidirectional flow cleanrooms.
Product Details
- Edition:
- 1st
- Published:
- 01/01/2009
- ISBN(s):
- 073379047
- Number of Pages:
- 67
- File Size:
- 1 file , 1.8 MB
- Product Code(s):
- 10147646, 10147563, 10147592